Hongsen Niu (광운대학교) | 한빛사논문 > 한빛사

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Hongsen NiuHongsen Niu

광운대학교

Chem. Eng. J., Volume 450, Part 3, 15 December 2022, 138258 | https://doi.org/10.1016/j.cej.2022.138258 Ultrasensitive capacitive tactile sensor with heterostructured active layers for tiny signal perception

Hongsen Niu a,e,1, Yuke Chen a,c,1, Eun-Seong Kim a,d,*, Weijia Zhou a,c, Yang Li a,b,*, Nam-Young Kim a,e,f,*

a RFIC Centre, Kwangwoon University, 20 Kwangwoon-ro, Nowon-Gu, Seoul 01897, South Korea b School of Information Science and Engineering, University of Jinan, Jinan 250022, China c Institute for Advanced Interdisciplinary Research, University of Jinan, Jinan 250022, China d Wavepia Co. Ltd, 557 Dongtangiheung-ro, Hwaseong-si, Gyeonggi-do 18469, South Korea e Department of Electronics Engineering, Kwangwoon University, 20 Kwangwoon-ro, Nowon-Gu, Seoul 01897, South Korea f NDAC Centre, Kwangwoon University, 20 Kwangwoon-ro, Nowon-Gu, Seoul 01897, South Korea

* Corresponding authors
1 Hongsen Niu and Yuke Chen contributed equally to this work.

Abstract

The development of capacitive tactile sensors with both ultrasensitivity and ultrafast response/relaxation is crucial for the development of intelligent healthcare monitoring technology. Despite the significant improvement in the sensing performance presented by the introduction of microstructures into the dielectric or electrode layers, meeting the demands of intellectualization remains a major challenge. Herein, a strategy to simultaneously introduce microstructures in both the dielectric and electrode layers is developed. The hierarchical sea-urchin TiO₂ particle-in-micropore (HSP-MP) structure in the dielectric layer induces stress concentration near the micropore regions, significantly enhancing the sensitivity and toughness of the device. The sparsely spaced large microcone improves the sensitivity of the hierarchical microcone (HM) structure in the electrode layer, while the small microcone reduces the hysteresis caused by interfacial adhesion. With the synergistic effect of the HSP-MP&HM structure, the proposed tactile sensor achieves ultrasensitivity of 10.5 kPa⁻¹, ultrafast response/relaxation time of 5.6/5.6 ms, and ultralow limit of detection of 0.1 Pa. These sensing properties are demonstrated in practical applications, including tiny signal perception of the human fingertip pulse, tiny muscle motion perception for Morse code transmission, and high-resolution flexible perception array with pressure mapping capability.

논문정보

형식Research article
게재일2022년 12월 (BRIC 등록일 2022-10-19)
연구진국내(교신)+국외 연구진
분야 바이오·의료융합 > 바이오센싱 및 나노바이오물질

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